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Piezoelectric Actuated Wafer Gripper

IP.com Disclosure Number: IPCOM000035133D
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Liporace, JW [+details]

Abstract

A wafer gripper has been developed which uses piezoelectric elements to actuate the fingers used for handling the wafer. It makes it possible to pick and place semiconductor wafers in the appropriate processing tool thereby minimizing surface contamination which may occur with more conventional approaches.