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Piezoelectric Actuated Wafer Gripper Disclosure Number: IPCOM000035133D
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-28

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Liporace, JW [+details]


A wafer gripper has been developed which uses piezoelectric elements to actuate the fingers used for handling the wafer. It makes it possible to pick and place semiconductor wafers in the appropriate processing tool thereby minimizing surface contamination which may occur with more conventional approaches.