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Thin Film Transistors With Low Contact Resistance Prepared by Selective Tungsten Deposition Technology

IP.com Disclosure Number: IPCOM000035140D
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Kuo, Y [+details]

Abstract

Disclosed are thin film transistor (TFT) structures with low resistance contacts which are prepared by selective tungsten deposition technology.