Automated Silicon Wafer Load/Unload System
Original Publication Date: 1989-Jul-01
Included in the Prior Art Database: 2005-Jan-28
A technique is described whereby an automated robotic system is used to automatically transport silicon wafers and backing discs into a processing chamber, as used during the manufacture of integrated circuits. The system is designed to operate with a minimum of operator intervention in a contaminant-free environment and to provide a tracking method so as to increase the efficiency in the handling of wafers.