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E-Beam Testing With an On-Chip Spectrometer Disclosure Number: IPCOM000035646D
Original Publication Date: 1989-Jul-01
Included in the Prior Art Database: 2005-Jan-28

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Pastol, Y Chiu, G [+details]


An on-chip secondary electron energy spectrometer is described. When used in the Picosecond Photoelectron Scanning Electron Microscope (PPSEM) [1] this spectrometer permits non-contact waveform measurements on wafers and unpackaged chips with a picosecond time resolution.