Browse Prior Art Database

E-Beam Testing With an On-Chip Spectrometer

IP.com Disclosure Number: IPCOM000035646D
Original Publication Date: 1989-Jul-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Pastol, Y Chiu, G [+details]

Abstract

An on-chip secondary electron energy spectrometer is described. When used in the Picosecond Photoelectron Scanning Electron Microscope (PPSEM) [1] this spectrometer permits non-contact waveform measurements on wafers and unpackaged chips with a picosecond time resolution.