E-Beam Testing With an On-Chip Spectrometer
Original Publication Date: 1989-Jul-01
Included in the Prior Art Database: 2005-Jan-28
An on-chip secondary electron energy spectrometer is described. When used in the Picosecond Photoelectron Scanning Electron Microscope (PPSEM)  this spectrometer permits non-contact waveform measurements on wafers and unpackaged chips with a picosecond time resolution.