Optical Atomic Force Sensor
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Topographies and force distributions across a surface are measured with great accuracy by scanning the surface by means of a measurement head combining the principles of atomic force microscopy (AFM), as described by G. Binnig et al. in Phys . Rev . Letters 56, 9, pp. 930-933 (March 1986), with an optical Fabry-Perot interferometer and two closed control loops.