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Optical Atomic Force Sensor

IP.com Disclosure Number: IPCOM000035780D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Bartha, J Kempf, J Nonnenmacher, M Pokrowsky, P Wagner, H [+details]

Abstract

Topographies and force distributions across a surface are measured with great accuracy by scanning the surface by means of a measurement head combining the principles of atomic force microscopy (AFM), as described by G. Binnig et al. in Phys . Rev . Letters 56, 9, pp. 930-933 (March 1986), with an optical Fabry-Perot interferometer and two closed control loops.