Browse Prior Art Database

Photoresist Shelflife Monitor

IP.com Disclosure Number: IPCOM000035781D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Powers, JE [+details]

Abstract

This article concerns a real-time Photoresist Shelflife Monitor (PSM) for tracking photoresist shelflife as it is affected by storage time and temperature.