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Spring Bellows Vibration Isolator Disclosure Number: IPCOM000035823D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

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Duerig, UT [+details]


A vibration-damping system is disclosed providing both low-frequency damping and excellent high-frequency vibration rejection in a single unit. The system is ideally suited for ultra-high vacuum work since no organic materials are exposed to the high vacuum side. The set up is shown in Fig. 1. It is similar to a spring suspension system with the spring being replaced by a stainless steel bellows 1 fitted with a CF35 conflat flange 2 at one end for mounting in a UHV chamber and a hook 3 at the other end providing a mount for the load. The exterior of the bellows 1 is exposed to UHV while the interior is filled with a viscous damping material 4 and evacuated in order to cancel excessive load due to pressure difference. (Image Omitted)