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Browse Prior Art Database

Pellicle Placement System

IP.com Disclosure Number: IPCOM000035845D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Johnson, A Kimmel, K Trollinger, RL Patel, PK [+details]

Abstract

A system for placing pellicles on masks is installed in a cleaning line such that cleaned masks are quickly covered by freshly cleaned pellicles. The placement system is bathed in a downward flow of clean air and all moving parts are constructed of materials selected for low particle generation.