Browse Prior Art Database

Particulate-Free Vacuum Handler and Transfer System

IP.com Disclosure Number: IPCOM000035857D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Hickey, TR [+details]

Abstract

By performing all transfer and handling operations in a vacuum environment and by having no rubbing, sliding, or gripping motions inside the evacuated region, particulate-free transfer of parts, e.g., semiconductor wafers, is achieved.