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Mechanism for Batch Wafer Notch Alignment Disclosure Number: IPCOM000035864D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

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Maring, SJ Spoor, TW [+details]


A device which uses a notching cam for alignment of semiconductor wafers has been developed which provides improved accuracy over procedures which use the flat of the wafer for alignment.