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Orientation Control of Thin Film Microstructure Disclosure Number: IPCOM000035905D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

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Bradley, RM Harper, ME Smith, DA Lin, T [+details]


The microstructure of thin films deposited on a substrate with accompanying ion bombardment can be precisely oriented by selecting the bombardment direction according to both the crystal structure of the film material and the substrate topography.