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Etch Bath for Films

IP.com Disclosure Number: IPCOM000035906D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Denison, EV Santini, H [+details]

Abstract

An etchant bath for a magnetic film containing nickel, iron and alumina and a nickel-iron titanium laminate comprises an aqueous solution of ammonium persulfate, nitric acid, ammonium oxalate and a fourth component which is dependent on the composition of the film to be etched.