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Method for Microscopic Edge Detection

IP.com Disclosure Number: IPCOM000035947D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Hall, DR Lopata, AD [+details]

Abstract

Disclosed is a method for analyzing certain types of metrology data from a microscopic system, in order to precisely and accurately locate edges contained in an observed sample.