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Hot Process Tube

IP.com Disclosure Number: IPCOM000035977D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Bauer, HJ Seifert, HG [+details]

Abstract

A quartz tube for hot processing is modified to reduce the exchange of hot gas and ambient air during wafer loading. This modification maintains an inert gas atmosphere in the tube, for example, for the silicide formation of metals which oxidize easily when heated.