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Hot Process Tube Disclosure Number: IPCOM000035977D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

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Related People

Bauer, HJ Seifert, HG [+details]


A quartz tube for hot processing is modified to reduce the exchange of hot gas and ambient air during wafer loading. This modification maintains an inert gas atmosphere in the tube, for example, for the silicide formation of metals which oxidize easily when heated.