Producing an Alloy Target
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Sputter targets, as are used in particular for the storage film of magneto-optical layers, contain as main constituents an alloy of rare earths and transition metals. Such alloys have the disadvantage that they are extremely brittle and hard, so that they are very difficult to produce with large dimensions by standard methods. This article describes a method of producing amorphous and homogeneous alloys.