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Method of Modifying the Wall Profile of Resist Patterns Disclosure Number: IPCOM000036014D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28

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Kreuter, V [+details]


By the controlled reimplementation of solvent into an exposed resist layer prior to its development, the wall profile and the dimensions of openings in the developed resist pattern are controlled.