Superconducting Films by Web Coating
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Techniques for fabrication of films, pellets, and targets of high Tc oxide superconductors, such as Y-Ba-Cu-O have included processes such as E-beam deposition, co-evaporation, sputtering, and, recently, plasma arc spraying, but these methods have limitations. It is desirable to be able to deposit films (thick or thin) at reasonable deposition rates and low substrate temperatures, with fine control of deposition parameters and the ability to pattern or delineate. It is also necessary to be able to make wires and ribbons reproducibly and inexpensively.