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Roughness Measurement by Means of a Fabry-Perot Interferometer

IP.com Disclosure Number: IPCOM000036099D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Kempf, J Wagner, H [+details]

Abstract

Optical methods of measuring the peak-to-valley height of technical surfaces with a sensitivity below light wavelength are a) scattered light methods, b) speckle contrast methods and c) white light coherence methods.