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Process for Producing a Precision Filter

IP.com Disclosure Number: IPCOM000036123D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Euen, W Hagmann, D [+details]

Abstract

A process sequence is described which permits producing filters with pore sizes down to 5 nm and the respective pore size to be kept with an accuracy of - 3%. The filters thus produced may be used to filter fluids and gases in semiconductor technology but also for separating viruses.