Spray Development Indicator and Sensing System
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28
In modern wafer processing for submicrometer lithographies, spray development offers many advantages over the old batch process using a recirculating development tank. In spray development, a fine mist of submicron aerosol particles is used to spray the developer (i.e., an aqueous solution of KOH or an organic solvent) over the surface of the wafer to be processed, while the wafer slowly rotates.