Browse Prior Art Database

Thermal Reflow of Patterned Resist Without Via Shifting

IP.com Disclosure Number: IPCOM000036132D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Feeley, JD Shen, WR Theisen, JF [+details]

Abstract

This article describes a novel process that minimizes image shifting and via size reduction during thermal reflow. (Image Omitted)