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Folded Trench Capacitor CMOS Cell

IP.com Disclosure Number: IPCOM000036189D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28

Publishing Venue

IBM

Related People

Authors:
Arienzo, M [+details]

Abstract

A technique is described whereby an ultra-thin folded trench capacitor CMOS cell is constructed utilizing improved selective epitaxy techniques. Described is a means of fabricating small size CMOS cells, with trench capacitor, that is operational in ultra large-scale integrated (ULSI) circuits.