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Process for Patterned Subcollector for Bipolar Circuits Disclosure Number: IPCOM000036291D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28

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Chen, TC Warnock, J [+details]


Disclosed is a method for producing a patterned subcollector for complementary bipolar circuits. The process avoids implantation of boron, relying on diffusion instead with a novel chem-mech polish step to remove the diffusion source and ensure a clean surface.