Process for Patterned Subcollector for Bipolar Circuits
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28
Disclosed is a method for producing a patterned subcollector for complementary bipolar circuits. The process avoids implantation of boron, relying on diffusion instead with a novel chem-mech polish step to remove the diffusion source and ensure a clean surface.