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Spectroscopic Pitch Measurement Technique

IP.com Disclosure Number: IPCOM000036422D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Conrad, EW Paul, DP [+details]

Abstract

This article relates to the measurement of the periodicity (pitch) of grating samples used as test sites for the purpose of monitoring critical sub-micron dimensions.