Browse Prior Art Database

X-Ray Lithography Mask With Visible Light Transmitting Areas

IP.com Disclosure Number: IPCOM000036537D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Dana, SS DiMilia, V Hodgson, RT [+details]

Abstract

Disclosed is a structure for a mask for X-ray Lithography which has areas transparent to visible light for mask wafer registration using visible light.