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X-Ray Lithography Mask With Visible Light Transmitting Areas Disclosure Number: IPCOM000036537D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue


Related People

Dana, SS DiMilia, V Hodgson, RT [+details]


Disclosed is a structure for a mask for X-ray Lithography which has areas transparent to visible light for mask wafer registration using visible light.