Filament Alignment Fixture
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
By means of an alignment fixture attached to an optical microscope, scanning electron microscope (SEM) filaments are aligned after installation in a standard, detachable capped filament holder and before installation of the holder in the SEM. Use of the alignment fixture replaces trial and error hand-held filament alignment and use of the SEM to verify alignment accuracy.