Device for Accurately Fixing Extremely Thin Measuring Samples for X-Ray Fluorescence
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
X-ray fluorescence (XRF) is used to effectively determine the elements/ composition and/or thickness of evaporated metal films. A problem arising with very thin films of, say, 10 to 100 nm, is a background signal which is unfavorably high compared with the low signal resulting from such films. Normally, the KaI lines are used to determine the elements/composition and/or thickness. For this purpose, the substrates on which the thin films are evaporated for testing have to be as thin as possible (using, for example, aluminum foils of a thickness of some m).