Browse Prior Art Database

Local Pressure Intensifier for Exposure Enhancement During Film Growth

IP.com Disclosure Number: IPCOM000036639D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Rettner, CT [+details]

Abstract

This invention applies to the production of films using evaporators or molecular beam epitaxy techniques. It allows a growing film to be exposed to pressures which would damage the deposition elements (ovens, filaments, etc.). This permits higher levels of oxidation than could otherwise be achieved, extending the range of possible structures that can be grown. (Image Omitted)