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Browse Prior Art Database

Vacuum Venting-Evaporator

IP.com Disclosure Number: IPCOM000036648D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Cosgrove, JF Kundlak, VH [+details]

Abstract

A simple, low cost, metal-filtering element is used to effectively control inert gas flow during back-fill of a metal evaporator system so as to eliminate undesired turbulence and movement of contaminants to wafers in the system.