Double-Sided Electrostatic Chuck
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
The electrostatic chuck described in this article can be easily installed or removed from a piece of equipment operating in a high vacuum system environment without venting the system. The chuck assembly requires no external wiring, has no moving parts, and utilizes the same mechanism that is employed to load and unload substrates, e.g., masks or wafers, thereby facilitating easy inspection and cleaning to prevent contamination build-up.