PROBING TECHNIQUE FOR 1m GEOMETRIES
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
Disclosed is a technique used to electrically probe very small contacts (1 m or less) at close spacings to each other. Proper sample preparation, a specific testing sequence, and the capability to see the contacts clearly while placing the probes on them, are all required to be successful.