Browse Prior Art Database

PROBING TECHNIQUE FOR 1m GEOMETRIES

IP.com Disclosure Number: IPCOM000036663D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Ilker, HF [+details]

Abstract

Disclosed is a technique used to electrically probe very small contacts (1 m or less) at close spacings to each other. Proper sample preparation, a specific testing sequence, and the capability to see the contacts clearly while placing the probes on them, are all required to be successful.