Browse Prior Art Database

Sealing System for Silicon Carbide Rods

IP.com Disclosure Number: IPCOM000036722D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Perinet, JB [+details]

Abstract

The present disclosure aims to improve sealing between the cantilever or quartz door and the rod to avoid HCl or dopant (BBr3) leakage during high temperature steps, such as diffusion/oxidation in the standard semiconductor manufacturing process.