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Mapping of Thin Film Elastic Constants and Density Using a Scanning Phase-Measuring Acoustic Microscope

IP.com Disclosure Number: IPCOM000036724D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Meeks, SW [+details]

Abstract

This invention is a new technique to map the elastic constants and density of a very thin film. This technique is applicable to films as thin as 10 angstroms. The method described here can map the density and elastic constants of thin film deposited on an anisotropic substrate with a lateral resolution of 5 microns. To accomplish this mapping a scanning phase-measuring acoustic microscope (SPAM) with a directional acoustic lens is required.