Mapping of Thin Film Elastic Constants and Density Using a Scanning Phase-Measuring Acoustic Microscope
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
This invention is a new technique to map the elastic constants and density of a very thin film. This technique is applicable to films as thin as 10 angstroms. The method described here can map the density and elastic constants of thin film deposited on an anisotropic substrate with a lateral resolution of 5 microns. To accomplish this mapping a scanning phase-measuring acoustic microscope (SPAM) with a directional acoustic lens is required.