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Linewidth Measurements by Reflected Light

IP.com Disclosure Number: IPCOM000036780D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Chappelow, RE Conrad, EW [+details]

Abstract

A dimensional measurement technique is shown for measuring semiconductor line widths in the one-micron size range, and in some cases in the 500 nm size range, employing some unique properties of reflected light.