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New Detector System for Scanning Electron Microscope

IP.com Disclosure Number: IPCOM000036797D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Via, GG [+details]

Abstract

Scanning electron microscopes (SEMs) are widely used in the development and manufacturing of semiconductors. Of paramount importance is their use in the development of LSI, VLSI and ULSI chips, where dimensions of the order of submicrometer are observed.