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Method to Improve Dielectric Properties of Insulators

IP.com Disclosure Number: IPCOM000036799D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Lamey, P Peterman, S Stanasolovich, D [+details]

Abstract

The effective dielectric constant of existing insulators can be lowered through process modification as opposed to the use of a new generation insulator with a lower intrinsic dielectric constant. Rather than using a blanket insulator, the insulator is patterned to support the interconnection metal at intervals along its length and at the interlevel via locations. Doing so allows air to become a significant portion of the effective dielectric constant. Since air has a much lower dielectric constant than existing organic or inorganic insulators, the effective dielectric constant is lowered.