Method to Improve Dielectric Properties of Insulators
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
The effective dielectric constant of existing insulators can be lowered through process modification as opposed to the use of a new generation insulator with a lower intrinsic dielectric constant. Rather than using a blanket insulator, the insulator is patterned to support the interconnection metal at intervals along its length and at the interlevel via locations. Doing so allows air to become a significant portion of the effective dielectric constant. Since air has a much lower dielectric constant than existing organic or inorganic insulators, the effective dielectric constant is lowered.