Browse Prior Art Database

Standing Wires on End

IP.com Disclosure Number: IPCOM000036844D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Bartush, TA [+details]

Abstract

A photolithography method is proposed to define wires in semiconductor devices so that wiring density is improved with no detriment to conductivity. The procedure uses sidewall deposition and etchback techniques to realize a composite wire on end supported by a mandrel.