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Free Turning Eccentric Etch Insert

IP.com Disclosure Number: IPCOM000036864D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Eisenhuth, G Kurdziel, M Royster, R [+details]

Abstract

The planetary etch tooling redesign discussed herein results in improved chemical etch processing and yield together with reduced maintenance down-time on the tool.