Method for Making Circuits on Circuit Boards
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
Gottsleben and Stuke [*] describe a method for building up the thickness of a metal line defined by local pyrolysis of an appropriate gas using a focused laser to provide the localization of the gas decomposition and, hence, the region of metal patterning. In the initial step of this reference, the laser causes pyrolytic deposition of tungsten onto the substrate at the position of focus. The substrate is contained in a chamber in which a partial pressure of tungsten hexafluoride is maintained as the precursor gas from which the metal deposition is derived. Subsequently, this line, which is quite thin, is increased in thickness by using a current to heat up the line to produce a localized pyrolysis via resistive heating of the line.