CONDUCTING OXIDE PASSIVATION OF HIGH Tc SUPERCONDUCTING OXIDE FILMS
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
The discovery of superconductivity above liquid nitrogen temperatures may become of extreme importance in the wiring in VLSI circuits, as well as in the semiconducting and in superconducting devices. 77K operation of Si-based FETs is inevitable for fine line dimensions below 0.5 mm, and CMOS process for liquid nitrogen operation has been tested already. The lowering of the temperature is important in significantly reducing RC losses in the interconnects when they are patterned out of normal metal. If the interconnect metal undergoes a resistive transition into a superconducting state above 77K, the delays due to the resistive voltage drop in the transmission lines would be zero.