FABRICATION OF HIGH Tc LAYERED SUPERCONDUCTOR INSULATOR SUPERCONDUCTOR TUNNEL JUNCTIONS
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
Disclosed is a method of fabricating high Tc ceramic tunnel junctions using planar sandwich, complete wafer processing. The entire MULTILAYER STRUCTURE IS GROWN IN SITU, AND THEN THE JUNCTIONS AR e patterned when the completed structure is removed to atmosphere.