Browse Prior Art Database

Registration of Electron Beam During Electron Beam Pattern Exposure

IP.com Disclosure Number: IPCOM000037009D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Brandis, EK Hodgson, RT Wells, OC [+details]

Abstract

Disclosed is a method of registration of an electron beam (EB) when no surface topographic features are present.