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Angle of Incidence Calibration With a Tapered Film for Ellipsometers

IP.com Disclosure Number: IPCOM000037062D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Ray, M [+details]

Abstract

Angles of incidence on an ellipsometer are more accurately measured utilizing a varying thickness or tapered film sample to calibrate the instrument. Error margins for the calibrated angle of incidence are also provided.