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Method for Eliminating Laser Splatter Concerns Resulting From the Deletion of Fuses in Semiconductor Logic

IP.com Disclosure Number: IPCOM000037102D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Cronin, JE Geffken, R [+details]

Abstract

A sacrificial coating is applied prior to logic testing and laser blowing of metal fuses, eliminating the need for "clean-up" of the splatter that results from blowing fuses.