Anodic Oxidation of Aluminum Studs for Defect Localization on Schottky Barrier Diodes
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
Anodic oxidation of aluminum S-studs is a useful technique for the detection of leaky junctions on advanced semiconductor devices. This paper describes a simple method of coloration of anodized S-studs in optical microscopy.