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Miniature Glass Disc Polishing System

IP.com Disclosure Number: IPCOM000037132D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Coutu, P [+details]

Abstract

A method is shown which allows real-time viewing of a top-down micropolishing process utilized for selective removal of various levels of a semiconductor chip for cross-sectional analysis. This method eliminates the need for interrupting the polishing process for the purpose of microscopically examining the specimen.