Miniature Glass Disc Polishing System
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
A method is shown which allows real-time viewing of a top-down micropolishing process utilized for selective removal of various levels of a semiconductor chip for cross-sectional analysis. This method eliminates the need for interrupting the polishing process for the purpose of microscopically examining the specimen.