The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Technique for Selectively Removing Geometries From a Lithographically Defined Pattern Using a Modified Image Reversal Process

IP.com Disclosure Number: IPCOM000037133D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue


Related People

Tornello, JA [+details]


Disclosed is a process for subtracting geometries defined by one lithography mask from another lithography mask, where the two intersect using a modified Image Reversal Process (IRP).