Improved Lift-Off Process for Fabricating Metal Studs (On Semiconductor Substrates)
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29
An improvement in existing processes for lift-off of fine structures, such as metal studs, is described in this article. The disclosed procedure employs the inverted lift-off technique to lift off metal but avoids problems related to long ashing of the underlaying material by use of a second solvent to effect its removal.