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Purification of Pyromellitate Diethyl Ester Diacyl Chloride

IP.com Disclosure Number: IPCOM000037264D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Arnold, AF Khojasteh, MM Macy, EH [+details]

Abstract

It is proposed to use a hot melt separation technique to purify the chloride intermediate used in the synthesis of polyamic acid ethyl ester (PAETE). The synthesized product is used as a planarizing film in the manufacture of semiconductor chips and its quality level is crucial to the performance of the chip. (Image Omitted)