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Improved Chlorination of Diethyl Pyromellitate Disclosure Number: IPCOM000037266D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

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Arnold, AF Khojasteh, MM Macy, EH McPhee, TA [+details]


An improved method of chlorinating diethyl pyromellitate, a component used in the manufacture of polyamic acid ethyl ester (PAETE), has been developed which results in a high purity final product. The PAETE is used as a planarizing insulator layer in the manufacture of semiconductor devices and its quality is critical to the performance of the finished device. (Image Omitted)